专利内容由知识产权出版社提供
专利名称：CHARGED PARTICLE RADIATION
APPARATUS, AND METHOD FORDISPLAYING THREE-DIMENSIONALINFORMATION IN CHARGED PARTICLERADIATION APPARATUS
发明人：YAGUCHI TOSHIE,NAGAKUBO
YASUHIRA,AZUMA JUNZO,WATABE AKIRA
申请号：EP10826621申请日：20101022公开号：EP2495748A4公开日：20131204
摘要：Disclosed is a charged particle radiation apparatus capable of capturing achange in a sample due to gaseous atmosphere, light irradiation, heating or the likewithout exposing the sample to atmosphere. The present invention relates to a sampleholder provided with a sample stage that is rotatable around a rotation axis
perpendicular to an electron beam irradiation direction, the sample holder being capableof forming an airtight chamber around the sample stage. A sample is allowed tochemically react in any atmosphere, and three-dimensional analysis on the reaction isenabled. A sample liable to change in atmosphere can be three-dimensionally analyzedwithout exposing the sample to the atmosphere.
申请人：HITACHI HIGH-TECHNOLOGIES CORPORATION
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